Inline Sputter System
(Horizontal Type)
Extensive Range of Products
Exploring boundless realms of scientific innovation – our repository offers an expansive array of research materials.
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Technical Support
Empowering research journeys with dedicated technical support for seamless access and utilization of scientific materials.
All Products
- Organic Electronic Materials
- Evaporation Materials, sources & Components
- Battery Materials
- Perovskite Materials
- Semiconductor Materials
- Custom Synthesis
- Intermediate Materials
- Substrates & Masks
- Organic Electronic Consumable Items
- Process Equipment
- Characterization Tools
- Simulation Software
System Configuration
| SL. NO. | ITEM | DESCRIPTION |
|---|---|---|
| 1 | Substrate Size | 200x200x0.7T Glass |
| 2 | Module Size | 3,100 x 1,500 x 1,500h |
| 3 | Weight | About 2,500kgf |
| 4 | Chamber Size | TM: About 1,300x 1,300 x 300h | Sputter: About 1,600 x 800 x 300h |
| 5 | Chamber Volume | TM: About 400 Liter | PM: About 500 Liter |
| 6 | Pass Line | 1400mm (Rectangular Gate Valve Center) |
| 7 | Sputter Type | DC Sputter |
| 8 | DC Power | 3~5kw |
| 9 | Target T/S | About 120mm |
| 10 | Target Size | About 106 x 400mm |
| 11 | Mfc(o2,ar ) | O2:50SCCM Ar: 100SCCM |
| 12 | Deposition Thickness | ~ 3,000 Å |
| 13 | Uniformity | ± ~10% |
| 14 | Pumping | Slow: NW16, Fast: NW40 |
| 15 | Turbo Pump / Valve | About 2,400Liter / MGI: ISO250 |
| 16 | Cryo Pump / Valve | Ulvac: 8~10in / MGI: ISO 200~250 |
| 17 | Dry Pump | About 10,000 liter |
Applications
- Optimized for OLED lighting panel production
- An inline type system in which the deposition process is carried out while the substrate moves, making it a highly productive system