Inline Sputter System
(Vertical Type)
Extensive Range of Products
Exploring boundless realms of scientific innovation – our repository offers an expansive array of research materials.
Global Delivery
Bringing scientific enlightenment worldwide, our delivery ensures global access to cutting-edge research materials.
Technical Support
Empowering research journeys with dedicated technical support for seamless access and utilization of scientific materials.
All Products
- Organic Electronic Materials
- Evaporation Materials, sources & Components
- Battery Materials
- Perovskite Materials
- Semiconductor Materials
- Custom Synthesis
- Intermediate Materials
- Substrates & Masks
- Organic Electronic Consumable Items
- Process Equipment
- Characterization Tools
- Simulation Software
System Configuration
| SL. NO. | ITEM | DESCRIPTION |
|---|---|---|
| 1 | Substrate Size (Glass) | Max 300x300 (Effective area: 270x270) | Tray size: About 480 x 460 |
| 2 | Module Size | 3,610 x 1070 x 2,250h |
| 3 | Weight | About 2,500kgf |
| 4 | Chamber Size | LL: About 700 x 380 x 800h | PM: About 2,000 x 380 x 800h |
| 5 | Chamber Volume | LL: About 200 Liter | PM: About 500 Liter |
| 6 | Pass Line | 1400mm(rectangular gate valve center) |
| 7 | PT Type | CCP type |
| 8 | RF & Matcher | 1kw |
| 9 | Sputter Type | DC sputter |
| 10 | DC Power | 3~5kw |
| 11 | Target T/S | 120~160mm |
| 12 | Target Size | About 106 x 500mm |
| 13 | Mfc(ar ) | 200SCCM |
| 14 | Deposition Thickness | Ti: ~ 1,000 Å , Cu : ~5000 Å |
| 15 | Uniformity | ± 5~10% |
| 16 | Pumping | Slow : NW16, Fast : NW50 |
| 17 | Turbo Pump / Valve | About1,500Liter / MGI : ISO200 |
| 18 | Cryo Pump / Valve | Ulvac : 8~10in / MGI : ISO 200~250 |
| 19 | Dry Pump | About 2,000 liter |
Applications
- Thin film (Metal, Oxide, TCO) processes on plastic, glass, etc.
- Applied to various products (Deco, Tool, Special model)