OLED Cluster System
Extensive Range of Products
Exploring boundless realms of scientific innovation – our repository offers an expansive array of research materials.
Global Delivery
Bringing scientific enlightenment worldwide, our delivery ensures global access to cutting-edge research materials.
Technical Support
Empowering research journeys with dedicated technical support for seamless access and utilization of scientific materials.
All Products
- Organic Electronic Materials
- Evaporation Materials, sources & Components
- Battery Materials
- Perovskite Materials
- Semiconductor Materials
- Custom Synthesis
- Intermediate Materials
- Substrates & Masks
- Organic Electronic Consumable Items
- Process Equipment
- Characterization Tools
- Simulation Software
System Configuration
| SL. NO. | ITEM | DESCRIPTION |
|---|---|---|
| 1 | Glass size(mm) | 200±0.2 x 200±0.2 x 0.4~1.1t (Small glass can be loaded on Tray) |
| 2 | Chamber Type | Square type (Material: SUS) Wall heater inside chamber |
| 3 | Pass Line | 1400mm |
| 4 | Gate Valve Center | 1400mm |
| 5 | Low-vac Pumping | Dry pump (20,000 L/min) | Slow: NW16, Fast: NW40 |
| 6 | Hi-vac Pumping | Cryo pump 12in, ISO 320 |
| 7 | Align Type | Rotation Auto Aligner |
| 8 | Auto Aligner Accuracy | ≤±2µm |
| 9 | Deposition Uniformity | OC : ≤±2% | MC : ≤±3% |
| 10 | Base | 5.0E-6 torr within 30 minutes |
| 11 | Ultimate | 2.0E-7 torr within 12 hours |
Applications
- System for OLED panel and material development & research
- High-efficiency/high-life panel manufacturing system through deposition/encapsulation process in ultra-high vacuum area