Spin Coater ACE 200

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System Configuration

SL. NO.SPECIFICATIONSDESCRIPTION
1Wafer size (Max.)Piece to 4" Diameter 6"
2Bowl size235 m/m Diameter
3Bowl materialSUS (option: P.P, Tefelon, etc)
4Special DC MotorUp & Down free
5Step100 step
6Memory storage100 program
7Rotation Speed0 to 50 ~ 8,000 гр
8Hold Time1~ 999sec
9Accuracy≤ 1 R.P.M
10Acceleration, Deceleration free1~ 3000 R.P.M/sec
11Graphic FuctionReal time for steps
12Power InputAC 220V, 50/60Hz
13Vacuum Input-450--650mmHg (6mm ID / 8mm OD)
14DisplayLCD (Back Light)
15System ControllerMCU (Digital Microprocess)
16MotorBLDC SERVO MOTOR
17Dimension (W X D X H)320 X 420 X 240 mm

Characteristics